We provide our customers with everything they need – hardware, software and services – to mass produce patterns on silicon, allowing them to increase the value and lower the cost of a chip.

EUV lithography systems

Extreme ultraviolet

The TWINSCAN NXE:3400B is our latest-generation EUV lithography system, combining productivity, highest resolution, and state-of-the-art overlay and focus performance.

DUV lithography systems

Deep ultraviolet


Immersion systems
Dry systems

Refurbished systems

Almost every lithography system that we’ve ever shipped is still in use at a customer fab. We refurbish ‘classic’ PAS 5500 and TWINSCAN lithography systems for a new life and a new purpose.

Refurbished PAS 5500 systems

Download the product descriptions and specs

Metrology & inspection systems

Delivering speed and accuracy, our metrology and inspection portfolio covers every step manufacturing processes, from R&D to mass production. Together with our computational lithography and patterning control software solutions, they help chipmakers achieve the highest yield and best performance in mass production.

YieldStar optical metrology

Our YieldStar optical metrology solutions can quickly and accurately measure the quality of patterns on the wafer.

E-beam metrology and inspection

Our HMI e-beam solutions help to locate and analyze individual chip defects amid millions of printed patterns.

Computational lithography

Our computational lithography and software solutions revolve around creating applications that enhance the setup of the lithography system, so that chipmakers can print exactly what they want to print. A foundational element for all these applications are accurate simulation models of the lithography process. These models represent a wide variety of physical and chemical effects. Machine learning solutions are now broadly used both in the simulation models as well as in the applications. Our solutions fall into four main areas:

  • Process window enhancement
  • Process window control

Customer support

At ASML, the customer always comes first. With more than 5,000 customer support employees, including service engineers and applications specialists, we make sure our systems in our customers’ fabs are running smoothly. We offer 24/7 support, next-day parts delivery, an easy centralized customer portal, and training for customer engineers. We work together with our customers as partners in innovation, offering tailor-made solutions to continuously improve our installed base performance in a rapidly changing environment.

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